1
Plasma nanoscience : basic concepts and applications of deterministic nanofabrication /
Book
...FGKJ - Plasma processing, etching...
Table of Contents 
2
Handbook of plasma immersion ion implantation and deposition /
Book
...FGKJ - Plasma processing, etching...
3
Plasma etching : an introduction /
Book
...FGKJ - Plasma processing, etching...
4
Etching compositions and processes.
Book
...FGKJ - Plasma processing, etching...
5
Glow discharge processes : sputtering and plasma etching /
Book
...FGKJ - Plasma processing, etching...
6
Auflösung von Kristallen : Theorie und technische Anwendung /
Book
...FGKJ - Plasma processing, etching...