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1
Book
Plasma nanoscience : basic concepts and applications of deterministic nanofabrication /
Ostrikov, Kostya (Ken)
2008
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FGKJ
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Plasma
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etching
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2
Book
Handbook of plasma immersion ion implantation and deposition /
Anders, Andre
2000
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3
Book
Plasma etching : an introduction /
Manos, Dennis M.
1989
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4
Book
Etching compositions and processes.
Collie, M. J.
1982
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5
Book
Glow discharge processes : sputtering and plasma etching /
Chapman, Brian N.
1980
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6
Book
Auflösung von Kristallen : Theorie und technische Anwendung /
Heimann, R. B.
1975
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FGKJ
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Available as
Print Edition
6
Material Type
Book
6
Type of Literature
Handbook, Textbook
Year of Publication
From:
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Location
ZB
6
IEK-4
1
Name
Anders, Andre
1
Chapman, Brian N.
1
Collie, M. J.
1
Flamm, Daniel L.
1
Heimann, R. B.
1
Manos, Dennis M.
1
more ...
Ostrikov, Kostya (Ken)
1
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Subject
etching
2
plasma etching
2
cold plasma
1
film deposition
1
glow discharge
1
industrial aspect
1
more ...
ion implantation
1
materials characterization
1
metal surface
1
nanostructured material
1
nanostructures
1
nanotechnology
1
plasma deposition
1
plasma processing
1
sputtering
1
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Classification
FGKJ - Plasma processing, etching
6
FGGB - Ion implantation, ion beam synthesis
1
FGKC - Vacuum deposition, MBE
1
FMGE - Metallographic specimen preparation
1
PGA - Plasma physics
1
PGCC - Electric discharges in gases
1
Language
English
1
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