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evaporation
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evaporation
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1
Book
Vakuumbeschichtung Vol 0002: Verfahren und Anlagen.
Kienel, G.
1995
“
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FGKJ
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Plasma
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Select result number 2
2
Book
Wear and corrosion resistant coatings by CVD and PVD /
Pulker, H. K.
1989
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FGKJ
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Plasma
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etching
...
”
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Available as
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2
Material Type
Book
2
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Location
ZB
2
Name
Bergmann, E.
1
Kienel, G.
1
Pulker, H. K.
1
Subject
evaporation
chemical vapor deposition
1
coating
1
corrosion resistance
1
etching
1
ion beam technology
1
more ...
ion plating
1
sputter deposition
1
sputtering
1
vacuum deposition
1
wear resistance
1
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Classification
FGKJ - Plasma processing, etching
2
FGKC - Vacuum deposition, MBE
1
FGKF - Chemical vapor deposition
1
FPQ - Surface friction, hardness, wear, lubrication
1
FPUG - Special purpose coatings
1
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