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1

Low energy ion beam and plasma modification of materials : Symposium on low energy ion beam and plasma modification of materials : Spring Materials Research Society conference 1991 : Spring MRS conference 1991 : Anaheim, CA, 30.04.91-02.05.91.

Book

Low energy ion beam and plasma modification of materials : Symposium on low energy ion beam and plasma modification of materials : Spring Materials Research Society conference 1991...

Harper, J. M.
1991

“...FGKJ - Plasma processing, etching...”

2

In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.

Book

In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.

Bernhardt, A. F.
1990

“...FGKJ - Plasma processing, etching...”

3

International Conference Ion and Plasma Assisted Techniques. 5 : (IPAT 1985) : München, 13.05.1985-15.05.1985.

Book

International Conference Ion and Plasma Assisted Techniques. 5 : (IPAT 1985) : München, 13.05.1985-15.05.1985.

Oechsner, H.
1985

“...FGKJ - Plasma processing, etching...”

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