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1

In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.

Book

In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.

Bernhardt, A. F.
1990

“...FGKJ - Plasma processing, etching...”

2

Plasma, electron, and laser beam technology : development and use in materials processing /

Book

Plasma, electron, and laser beam technology : development and use in materials processing /

Arata, Yoshiaki
1986

“...FGKJ - Plasma processing, etching...”

3

Laser assisted deposition, etching, and doping : Los-Angeles, CA, 26.01.1984-27.01.1984 /

Book

Laser assisted deposition, etching, and doping : Los-Angeles, CA, 26.01.1984-27.01.1984 /

Allen, Susan D.
1984

“...FGKJ - Plasma processing, etching...”

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