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Apelian, Diran
2
Broszeit, E.
2
Flamm, Daniel L.
2
Heimann, R. B.
2
Kilper, Thilo
2
Pulker, H. K.
2
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Szekely, Julian
2
Zhou, Dapeng
2
Allen, Susan D.
1
Ambacher, Oliver
1
Anders, Andre
1
Annett, D. M.
1
Arata, Yoshiaki
1
Auciello, Orlando
1
Beckert, M.
1
Benko, B.
1
Bergmann, E.
1
Bernhardt, A. F.
1
Bock, F.
1
Bogenschütz, August Friedrich.
1
Bolt, Harald
1
Brauer, K. H.
1
Chang, R. P.
1
Chapman, Brian N.
1
Cheremisinoff, Paul N.
1
Coburn, J. W.
1
Collie, M. J.
1
D' Agostino, Riccardo.
1
Datta, Madhav
1
Dembovsky, V.
1
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plasma processing
24
etching
20
plasma etching
16
plasma deposition
13
thin film technology
5
chemical vapor deposition
4
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coating
4
plasma arc spraying
4
plasma physics
4
silicon
4
electron beam processing
3
ion beam processing
3
ion implantation
3
laser processing
3
materials processing
3
sputter deposition
3
surface modification
3
III - V semiconductor
2
coating process
2
cold plasma
2
evaporation
2
film deposition
2
glow discharge
2
metal surface
2
plasma
2
plasma diagnostics
2
plasma wall interaction
2
semiconductor
2
silicon solar cell
2
spray coating
2
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FGKJ - Plasma processing, etching
92
FAF - Materials research - comprehensive works
8
FPU - Corrosion protection, surface coating
6
FGGE - Ion beam surface modification
5
FGJ - Laser and electron beam processing
5
FGK - Thin film technology, epitaxy
5
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FGKC - Vacuum deposition, MBE
5
FGM - Microelectronic technology
5
FPUG - Special purpose coatings
5
PGA - Plasma physics
4
FJKB - Elemental semiconductors
3
FPQ - Surface friction, hardness, wear, lubrication
3
CLD - High temperature chemistry, plasma chemistry
2
EISF - Thin film solar cells
2
FGGB - Ion implantation, ion beam synthesis
2
FGKF - Chemical vapor deposition
2
FHAB - Surface and thin film characterization
2
FJKC - III - V semiconductors
2
FMGE - Metallographic specimen preparation
2
FPUJ - Surface engineering
2
PGCC - Electric discharges in gases
2
CER - Macromolecular compounds - synthesis and reactions
1
FAQ - Materials research - institutions, research and development
1
FDCD - Dislocations
1
FFP - Physics of thin films
1
FGA - Materials processing - general aspects
1
FGCD - Crystal growth of specific substances
1
FGCK - Crystal technology
1
FGG - Ion beam technology
1
FGT - Microtechnology
1
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