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Semiconductor microchips and fabrication : a practical guide to theory and manufacturing /
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Molecular technology . 1 . Energy innovation /
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Microelectronic applications of chemical mechanical planarization /
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Li, Yuzhuo
2008
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Micro materials : 3rd international conference and poster exhibition : proceedings : MicroMat 2000, April 17 - 19, 2000, Berlin, Germany /
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Michel, B.
2000
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Publications / Fraunhofer Institut für Mikroelektronische Schaltungen und Systeme. 1986.
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1986
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