Sze, S. M. 3 Adam, Douglas J. 1 Ayon, Arturo A. 1 Broussard, Phillip R. 1 Buchheit, Thomas E. 1 Chang, C. Y. 1 more ... Deal, Michael D. 1 Einspruch, N. G. 1 Francombe, Maurice H. 1 Grabinski, Hartmut 1 Griffin, Peter B. 1 Harris, David. 1 Huff, H. R. 1 Jackson, K. A. 1 Kahn, Harold 1 Mader, H. 1 Menz, Wolfgang. 1 Mohr, Jürgen. 1 Paul, Oliver. 1 Perera, A. G. U. 1 Plummer, James D. 1 Quay, Rüdiger. 1 Ruge, I. 1 Spearing, S. Mark 1 Tauber, Richard N. 1 Taylor, Deborah J. 1 Weste, Neil H. E. 1 Wolf, Stanley. 1 Wood, Colin E. C. 1 see all ... less ...

VLSI technology 5 microelectronics 3 solid state device 3 thin film technology 3 ULSI (ultra large scale integration) 2 epitaxy 2 more ... field effect transistor 2 integrated circuit 2 lithography 2 microstructure 2 semiconductor device 2 transistor 2 MOS transistor 1 SQUID (superconducting quantum interference device) 1 chemical vapor deposition 1 computer simulation 1 connector 1 dielectric film 1 diode 1 etching 1 fabrication 1 ferroelectric material 1 heterojunction 1 heterostructure 1 infrared detector 1 light emitting device ( LED ) 1 magnetic film 1 magnetooptics 1 materials science 1 mechanical properties 1 see all ... less ...

FGM - Microelectronic technology 21 FGK - Thin film technology, epitaxy 8 FJLB - Physics of semiconductor devices 4 TBL - VLSI 4 FJL - Physics of solid state devices 3 TBF - Semiconductor devices 2 more ... FAF - Materials research - comprehensive works 1 FAN - Solid state physics - mathematical methods, computer applications 1 FGA - Materials processing - general aspects 1 FGCD - Crystal growth of specific substances 1 FGKJ - Plasma processing, etching 1 FGT - Microtechnology 1 FJBE - Ferroelectric materials 1 FKGM - Magnetic films 1 FLGD - Superconducting devices, circuits 1 TBV - Electronic devices 1 see all ... less ...

English 3