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Fotolithografie: Grundlagen der Mikrostrukturierung /
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Microelectronic applications of chemical mechanical planarization /
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Li, Yuzhuo
2008
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RFID-Handbuch : Grundlagen und praktische Anwendungen induktiver Funkanlagen, Transponder und kontaktloser Chipkarten /
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Micro-nanofabrication : technologies and applications /
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Cui, Zheng
2005
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Fundamentals of microfabrication : the science of miniaturization /
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Electrochemical technology applications in electronics : proceedings of the Third International Symposium [on Electrochemical Technology Applications in Electronics during October 20 - 22, 1999 in Honolulu, Hawaii, as a part of the joint meeting of the Electrochemical Societies between USA and Japan ...] /
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Annual review of materials science. 30 /
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Micro materials : 3rd international conference and poster exhibition : proceedings : MicroMat 2000, April 17 - 19, 2000, Berlin, Germany /
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Michel, B.
2000
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Techniques and industrial applications /
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Mikroelektronik. 2. Herstellungsprozesse für integrierte Schaltungen /
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Fundamental electrochemistry and physics /
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Handbook of semiconductor interconnection technology /
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Characterization and metrology for ULSI technology : 1998 international conference Gaithersburg, Maryland [23. - 27.] March 1998 : [the 1998 International Conference on Characterization and Metrology for ULSI Technology] /
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Chemical mechanical planarization of microelectronic materials /
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The Physics of micro/nano-fabrication /
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State of the art program on compound semiconductors 0016: proceedings : SOTAPOCS 0016: proceedings : Symposium on materials and processing issues for large scale integrated electronic and photonic arrays : Electrochemical Society spring meeting : Saint-Louis, MO, 17.05.92-22.05.92.
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An Introduction to semiconductor microtechnology /
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Handbook of semiconductor silicon technology /
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Semiconductor integrated circuit processing technology /
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Microelectronic processing : an introduction to the manufacture of integrated circuits /
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