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Semiconductor microchips and fabrication : a practical guide to theory and manufacturing /
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Microelectronic applications of chemical mechanical planarization /
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Li, Yuzhuo
2008
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Handbook of thin film devices. 2. Semiconductor optical and electro-optical devices /
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The physics of information technology /
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Handbook of semiconductor manufacturing technology /
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Modern semiconductor device physics /
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Sze, S. M.
1998
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International Electron Devices Meeting. 1998 : IEDM : technical digest : San Francisco, CA, December 6-9, 1998.
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1998
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Mikroelektronik. 2. Herstellungsprozesse für integrierte Schaltungen /
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Silicon devices : structures and processing /
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International Electron Devices Meeting. 1997 : Washington, DC, December 7-10, 1997 : EDM technical digest.
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1997
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The national technology roadmap for semiconductors /
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1997
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Technologie der III/V-Halbleiter : III/V-Heterostrukturen und elektronische Höchstfrequenz-Bauelemente /
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International Electron Devices Meeting. 1996 : IEDM : technical digest : San Francisco, CA, December 8-11, 1996.
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1996
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International Electron Devices Meeting. 1995 : IEDM : technical digest : Washington, DC, December 10 -13, 1995.
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1995
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Einführung in die Halbleitertechnologie.
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III-V electronic and photonic device fabrication and performance: symposium: papers : San-Francisco, CA, 12.04.93-15.04.93.
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IEEE International Electron Devices Meeting. 1993 : technical digest : IEDM : Washington, DC, 05.12.93-08.12.93.
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IEEE International Electron Devices Meeting. 1992 : IEDM : technical digest : San-Francisco, CA, 13.12.92-16.12.92.
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Ipri, A.
1992
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International symposium on cleaning technology in semiconductor device manufacturing 0002: proceedings : Electrochemical Society fall meeting 1992 : Phoenix, AZ, 14.10.92-18.10.92.
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International Electron Devices Meeting. 1991 : IEDM : technical digest : Washington, DC, 08.12.91-11.12.92.
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