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Einspruch, N. G.
14
Board, K.
4
Sze, S. M.
4
Wolf, Stanley.
4
Colinge, Jean-Pierre
3
Morgan, D. V.
3
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Murarka, Shyam P.
3
Biswas, Rajendra Narayanan
2
Campbell, S. A.
2
Constantopoulos, N.
2
Einspruch, Norman G.
2
Gail, Lothar
2
Hanke, Jan-Philipp
2
Hartnagel, Hans Ludwig
2
Hoppe, Bernhard.
2
Hölzle, R.
2
Kaiser, G.
2
Kasper, Erich.
2
Langen, Wolfgang
2
Levy, R. A.
2
Machlin, Eugene S.
2
Mader, H.
2
Nalwa, Hari Singh
2
Nishizawa, J.
2
Paul, D. J.
2
Ruge, I.
2
Sugano, T.
2
Tauber, Richard N.
2
Varadan, Vijay. K.
2
Weste, Neil H. E.
2
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microelectronics
61
VLSI technology
31
semiconductor device
28
integrated circuit
27
microfabrication (for microelectronics only)
27
semiconductor processing
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thin film technology
18
silicon
16
VLSI (very large scale integration)
15
solid state device
15
semiconductor
12
electronic device
10
microtechnology
9
chemical vapor deposition
8
etching
7
field effect transistor
7
lithography
7
sensor (technical and physical)
7
MOS transistor
6
epitaxy
6
transistor
6
cleaning
5
gallium arsenide
5
nanotechnology
5
MOS device
4
diode
4
fabrication
4
information technology
4
optoelectronics
4
quantum electronics
4
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FGM - Microelectronic technology
278
FGK - Thin film technology, epitaxy
35
FJLB - Physics of semiconductor devices
22
TBF - Semiconductor devices
20
FJL - Physics of solid state devices
17
TBJ - Integrated circuits
14
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TBL - VLSI
14
TBV - Electronic devices
14
FAF - Materials research - comprehensive works
10
FFPE - Thin film electronic properties, semiconductor interfaces
9
FGMH - Metallization, physics of microelectronics
9
FGCD - Crystal growth of specific substances
7
FJKC - III - V semiconductors
7
FAQ - Materials research - institutions, research and development
5
FFP - Physics of thin films
5
FGKJ - Plasma processing, etching
5
FJKB - Elemental semiconductors
5
TBD - Microelectronics
5
FGN - Nanotechnology
4
FANE - Computational solid state physics
3
FFPG - Multilayer systems, quantum structures
3
FGT - Microtechnology
3
FJH - Semiconductor physics
3
FJK - Specific semiconductor materials
3
FLGD - Superconducting devices, circuits
3
LME - Biophysics - general aspects
3
TBG - Transistors
3
TBW - Sensors, actuators
3
TKD - Air conditioning, refrigeration
3
AZZ - Firm index - general
2
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