1
Microelectronic applications of chemical mechanical planarization /
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Li, Yuzhuo
2008
“...FGM - Mikroelektronik - Technologie...”
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International Electron Devices Meeting. 2005 : IEDM : short course feedback next generation semiconductor manufacturing : [Washington, DC December 4, 2005 /
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2005
“...FGM - Mikroelektronik - Technologie...”
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International Electron Devices Meeting. 2000 : IEDM : technical digest : San Francisco, CA December 10-13, 2000 /
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2000
“...FGM - Mikroelektronik - Technologie...”
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International Electron Devices Meeting. 1999 : IEDM : technical digest : Washington, DC, December 5-8, 1999 /
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1999
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International Electron Devices Meeting. 1998 : IEDM : technical digest : San Francisco, CA, December 6-9, 1998.
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1998
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International Electron Devices Meeting. 1997 : Washington, DC, December 7-10, 1997 : EDM technical digest.
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1997
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International Electron Devices Meeting. 1996 : IEDM : technical digest : San Francisco, CA, December 8-11, 1996.
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1996
“...FGM - Mikroelektronik - Technologie...”
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International Electron Devices Meeting. 1995 : IEDM : technical digest : Washington, DC, December 10 -13, 1995.
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1995
“...FGM - Mikroelektronik - Technologie...”
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IEEE International Electron Devices Meeting. 1993 : technical digest : IEDM : Washington, DC, 05.12.93-08.12.93.
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“...FGM - Mikroelektronik - Technologie...”
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IEEE International Electron Devices Meeting. 1992 : IEDM : technical digest : San-Francisco, CA, 13.12.92-16.12.92.
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Ipri, A.
1992
“...FGM - Mikroelektronik - Technologie...”
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International Electron Devices Meeting. 1991 : IEDM : technical digest : Washington, DC, 08.12.91-11.12.92.
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“...FGM - Mikroelektronik - Technologie...”
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IEEE International Electron Devices Meeting. 1989 : IEDM : technical digest : Washington, DC, 03.12.89-06.12.89.
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Sodini, C.
1989
“...FGM - Mikroelektronik - Technologie...”
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IEEE International Electron Devices Meeting. 1988 : IEDM : technical digest : San-Francisco, CA, 11.12.88-14.12.88.
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1988
“...FGM - Mikroelektronik - Technologie...”
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