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Beyond-CMOS technologies for next generation computer design /
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Microelectronic applications of chemical mechanical planarization /
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Li, Yuzhuo
2008
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Fundamentals of microfabrication : the science of miniaturization /
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Characterization and metrology for ULSI technology : 1998 international conference Gaithersburg, Maryland [23. - 27.] March 1998 : [the 1998 International Conference on Characterization and Metrology for ULSI Technology] /
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International Electron Devices Meeting. 1997 : Washington, DC, December 7-10, 1997 : EDM technical digest.
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1997
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Hybridintegration : Technologie und Entwurf von Dickschichtschaltungen /
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Reichl, H.
1986
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Mess- und Prüftechnik.
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Zerbst, M.
1986
“...FGM - Mikroelektronik - Technologie...”
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