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Silicon processing for the VLSI era. 1. Process technology /
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International Electron Devices Meeting. 1999 : IEDM : technical digest : Washington, DC, December 5-8, 1999 /
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1999
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Microlithography : process technology for IC fabrication /
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Plasma processing for VLSI.
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VLSI technology /
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Sze, S. M.
1983
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Silicides for VLSI applications /
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