ZB 18

Ahmed, Haroon 2 Biswas, Rajendra Narayanan 2 Cleaver, John R. A. 2 Hartnagel, Hans Ludwig 2 Jones, Geraint A. C. 2 Blais, P. D. 1 more ... Broers, Alec Nigel 1 Cherns, D. 1 Constantopoulos, N. 1 Cosnier, Serge 1 Cristoloveanu, Sorin 1 Einspruch, Norman G. 1 Glendinning, William B. 1 Helbert, John N. 1 Hess, D. W. 1 Kaiser, G. 1 Li, Sheng S. 1 Lian, Yaguang 1 Lill, Thorsten 1 McMahon, Richard A. 1 Schwaab, Daniel 1 Topaloglu, Rasit O. 1 Wagner, A. 1 Wong, H.-S. Philip 1 Wong, S. S. 1 see all ... less ...

microelectronics 6 semiconductor 5 VLSI technology 3 electronic device 3 microlithography 3 electron beam lithography 2 more ... integrated circuit 2 photoresist 2 silicon 2 Nanostructured material 1 X-ray lithography 1 bioelectrochemical system 1 biomaterial 1 characterization 1 chemical vapor deposition 1 electrochemical engineering 1 electron microscopy 1 electronic circuit 1 electronic packaging 1 energy efficiency 1 etching 1 film deposition 1 information technology 1 insulator 1 ion beam lithography 1 liquid phase epitaxy 1 materials characterization 1 materials processing 1 metallization 1 microfabrication (for microelectronics only) 1 see all ... less ...

FGM - Microelectronic technology 9 FGME - Microlithography 6 FGMH - Metallization, physics of microelectronics 2 TBA - Electronic engineering - general 2 FAF - Materials research - comprehensive works 1 FAQ - Materials research - institutions, research and development 1 more ... FGGB - Ion implantation, ion beam synthesis 1 FGGE - Ion beam surface modification 1 FGJ - Laser and electron beam processing 1 FGKJ - Plasma processing, etching 1 FGML - Characterization of electronic materials 1 FHG - Electron microscopy 1 FJEH - Molecular electronics 1 FJLB - Physics of semiconductor devices 1 FMT - Refractory metals, refractory alloys 1 LMS - Bioenergetics 1 TBD - Microelectronics 1 TBJ - Integrated circuits 1 see all ... less ...