1
Silicon processing for the VLSI era. 1. Process technology /
Book
...FGM - Mikroelektronik - Technologie...
2
Chemical vapor deposition of tungsten and tungsten silicides for VLSI/ULSI applications /
Book
...FGM - Mikroelektronik - Technologie...
3
Silicon on insulator technology : materials to VLSI.
Book
...FGM - Mikroelektronik - Technologie...
4
Novel silicon based technologies : NATO advanced study institute on novel silicon based technologies: proceedings : Boca-Raton, FL, 17.07.89-28.07.89.
Book
5
Silicon processing for the VLSI era. 2. Process integration.
Book
...FGM - Mikroelektronik - Technologie...
6
Tungsten and other advanced metals for VLSI/ULSI applications. 0005 : Workshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications : 0005: proceedings : San-Mateo, CA, Tokyo, 20.09.89-21.09.89 ; 19.10.89-20.10.89
Book
7
Semiconductor integrated circuit processing technology /
Book
...FGM - Mikroelektronik - Technologie...
8
Tungsten and other refractory metals for VLSI applications. 4 : International workshop on tungsten and other refractory metals for VLSI applications. 1988: proceedings : Albuquerque, NM, 04.10.88-06.10.88.
Book
9
Microelectronics processing: chemical engineering aspects /
Book
...FGM - Mikroelektronik - Technologie...
10
VLSI technology /
Book
Sze, S. M.
1988
...FGM - Mikroelektronik - Technologie...
11
Tungsten and other refractory metals for VLSI applications. 3 : Workshop on tungsten and other refractory metals for vlsi applications. 1987: proceedings : Yorktown-Heights, NY, 07.10.87-09.10.87.
Book
12
Tungsten and other refractory metals for VLSI applications. 2 : Workshop on Tungsten and Other Refractory Metals for VLSI Application : 1986: proceedings : Palo-Alto, CA, 12.11.86-14.11.86.
Book
13
Frontiers in electronic materials and processing. 1, 32 : Topical conference on frontiers in electronic materials and processing : AVS national symposium : Houston, TX, 19.11.85-21.11.85.
Book
14
Tungsten and other refractory metals for VLSI applications. 1 : Workshop on tungsten and other refractory metals for VLSI applications. 1985: proceedings : Workshop on tungsten and other refractory metals for VLSI applications. 1984: proceedings : Albuquerque, NM, 07.10.85-09.10.85 ; 12.11.84-13.11.84.
Book
15
Silicon materials.
Book
...FGM - Mikroelektronik - Technologie...
16
VLSI, technology and design /
Book
...FGM - Mikroelektronik - Technologie...
17
VLSI electronics microstructure science. 7 /
Book
...FGM - Mikroelektronik - Technologie...
18
VLSI technology /
Book
Sze, S. M.
1983
...FGM - Mikroelektronik - Technologie...
19
VLSI technologies through the 80s and beyond.
Book
...FGM - Mikroelektronik - Technologie...
20
VLSI electronics microstructure science. 4.
Book
...FGM - Mikroelektronik - Technologie...