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1
Book
Stress induced phenomena in metallization : 5th International Workshop [on Stress Induced Phenomena in Metallization] : Stuttgart, Germany, June 1999 /
Kraft, Oliver
1999
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2
Book
Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /
Wilson, Syd Robert.
1993
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3
Book
Chemical vapor deposition of tungsten and tungsten silicides for VLSI/ULSI applications /
Schmitz, John E. J.
1992
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Tungsten and other advanced metals for VLSI/ULSI applications. 0005 : Workshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications : 0005: proceedings : San-Mateo, CA,...
Wong, S. S.
1990
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Tungsten and other refractory metals for VLSI applications. 4 : International workshop on tungsten and other refractory metals for VLSI applications. 1988: proceedings : Albuquerqu...
Blewer, R. S.
1989
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Tungsten and other refractory metals for VLSI applications. 3 : Workshop on tungsten and other refractory metals for vlsi applications. 1987: proceedings : Yorktown-Heights, NY, 07...
Wells, V. A.
1988
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Tungsten and other refractory metals for VLSI applications. 2 : Workshop on Tungsten and Other Refractory Metals for VLSI Application : 1986: proceedings : Palo-Alto, CA, 12.11.86-...
Broadbent, E. K.
1987
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8
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Tungsten and other refractory metals for VLSI applications. 1 : Workshop on tungsten and other refractory metals for VLSI applications. 1985: proceedings : Workshop on tungsten and...
Blewer, R. S.
1986
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Available as
Print Edition
8
Material Type
Book
8
Type of Literature
Conference Publication
6
Handbook, Textbook
2
Year of Publication
From:
To:
Location
ZB
8
IFF
1
Name
Blewer, R. S.
2
Broadbent, E. K.
1
Freeman, John L.
1
Kraft, Oliver
1
Schmitz, John E. J.
1
Tracy, Clarence J.
1
more ...
Wells, V. A.
1
Wilson, Syd Robert.
1
Wong, S. S.
1
see all ...
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Subject
metallization
VLSI technology
6
tungsten
6
chemical vapor deposition
2
electronic packaging
1
integrated circuit
1
more ...
silicide
1
thermal stress
1
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Classification
FGMH - Metallization, physics of microelectronics
8
FMT - Refractory metals, refractory alloys
5
FGKF - Chemical vapor deposition
1
Language
English
1
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