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Books & more: Hits 1 - 16 of 16

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Book

Principles of lithography /

Levinson, Harry J.
2001

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Book

Mikroelektronik. 2. Herstellungsprozesse für integrierte Schaltungen /

Hoppe, Bernhard.
1998

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Book

Handbook of microlithography, micromachining, and microfabrication. 2. Micromachining and microfabrication /

Rai-Choudhury, P.
1997

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Handbook of microlithography, micromachining, and microfabrication. 1. Microlithography /

Rai-Choudhury, P.
1997

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Introduction to microlithography.

Thompson, L. F.
1994

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Book

Mikromechanik : Einführung in Technologie und Anwendungen.

Buettgenbach, S.
1994

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Book

Resists in microlithography and printing.

Bednar, B.
1993

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Book

The Physics of submicron lithography /

Valiev, Kamil Akhmetovich.
1992

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Book

Handbook of VLSI microlithography : principles, technology, and applications /

Glendinning, William B.
1991

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Book

Microcircuit engineering. 1989 : Microcircuit engineering: international conference. 15 : International conference on microlithography : ME. 1989 : Cambridge, 26.09.89-28.09.89 /

Ahmed, Haroon
1990

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Book

Microelectronics processing: chemical engineering aspects /

Hess, D. W.
1989

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Book

Microlithography : process technology for IC fabrication /

Elliott, David J.
1986

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Book

Microcircuit engineering 1986 : ME 1986 : proceedings of the International Conference on Microlithography : Interlaken, September 23 - 25, 1986 /

Lehmann, H. W.
1986

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Book

Microcircuit engineering 1985 : ME 1985 : proceedings of the International Conference on Microlithography : Rotterdam, September 23 - 25, 1985 /

Van der Mast, K. D.
1985

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Microcircuit engineering. 1984 : Microcircuit engineering conference. 1984: proceedings : ME. 1984: proceedings : Berlin, 25.09.1984-29.09.1984.

Heuberger, A.
1985

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Book

Introduction to microlithography : Theory, materials, and processing : American Chemical Society meeting. 0185 : Seattle, WA, 20.03.83-25.03.83.

Thompson, L. F.
1983

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Print Edition 16

Book 16

Handbook, Textbook 5 Conference Publication 5

From:

To:

ZB 16 IBN-1-2 1

Rai-Choudhury, P. 2 Thompson, L. F. 2 Ahmed, Haroon 1 Bednar, B. 1 Broers, Alec Nigel 1 Buettgenbach, S. 1 more ... Cleaver, John R. A. 1 Elliott, David J. 1 Glendinning, William B. 1 Helbert, John N. 1 Hess, D. W. 1 Heuberger, A. 1 Hoppe, Bernhard. 1 Jones, Geraint A. C. 1 Kralicek, J. 1 Lehmann, H. W. 1 Levinson, Harry J. 1 McMahon, Richard A. 1 Valiev, Kamil Akhmetovich. 1 Van der Mast, K. D. 1 Yeltsov, A. V. 1 Zachoval, J. 1 see all ... less ...

microlithography microfabrication (for microelectronics only) 5 lithography 3 optical microlithography 3 chemical vapor deposition 2 microelectronics 2 more ... photoresist 2 plasma etching 2 VLSI technology 1 X-ray lithography 1 actuator 1 atom 1 diffusion 1 electron beam lithography 1 electronic packaging 1 epitaxy 1 etching 1 film deposition 1 interaction 1 ion implantation 1 ionizing radiation 1 liquid phase epitaxy 1 materials processing 1 mechanics 1 metrology 1 microtechnology 1 molecule 1 polymer 1 printing 1 semiconductor device 1 see all ... less ...

FGME - Microlithography 14 FGM - Microelectronic technology 2 TBD - Microelectronics 1

English 3

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