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Semiconductor microchips and fabrication : a practical guide to theory and manufacturing /
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Microelectronic applications of chemical mechanical planarization /
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Li, Yuzhuo
2008
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Handbook of semiconductor wafer cleaning technology : science, technology, and applications /
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Halbleiter- Technologie: eine Einführung in die Prozesstechnik von Silizium und III-V Verbindungen.
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Novel silicon based technologies : NATO advanced study institute on novel silicon based technologies: proceedings : Boca-Raton, FL, 17.07.89-28.07.89.
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Silicon on insulator technology : materials to VLSI.
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An Introduction to semiconductor microtechnology /
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