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Benoit, H.
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Benoit, H.
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1
Book
Electronic applications.
Benoit, H.
1988
“
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FGME
-
Microlithography
...
”
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ZB
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Benoit, H.
Diaz, A. F.
1
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photoresist
1
Classification
CER - Macromolecular compounds - synthesis and reactions
1
FGME - Microlithography
1
FPUD - Organic coatings
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