Skip to content
Toggle navigation
VuFind
0
Items in e-Shelf
(Full)
History
User Account
Logout
User Account
Help
English
Deutsch
Books & more
Articles & more
JuSER
All Fields
Title
Journal Title
Name
Institution
Subject
Classification
Shelf Classification
Table of Contents
DOI
ISBN/ISSN
Call number
Report Number
Barcode
Full Texts (available in selection)
Find
Advanced
Reset Filters
FAF - Materials research - comprehensive works
Reset Filters
Show filters (1)
FAF - Materials research - comprehensive works
Ask a Librarian
Books & more
: Hits
1 - 2
of
2
sort by
Relevance
Year (descending)
Year (ascending)
Call Number
Author
Title
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Select result number 1
1
Book
Materials aspects of x-ray lithography : Symposium on materials aspects of x-ray lithography: papers : MRS spring meeting : San-Francisco, CA, 12.04.93-14.04.93.
Celler, G. K.
1993
“
...
FGME
-
Microlithography
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 2
2
Book
Materials science of high temperature polymers for microelectronics : Symposium on materials science of high temperature polymers for microelectronics : MRS spring meeting 1991: sy...
Grubb, D. T.
1991
“
...
FGME
-
Microlithography
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Back
Narrow Search Results
Available as
Print Edition
2
Material Type
Book
2
Type of Literature
Conference Publication
2
Year of Publication
From:
To:
Location
ZB
2
Name
Celler, G. K.
1
Grubb, D. T.
1
Subject
X-ray lithography
1
electronic packaging
1
microelectronics
1
polymer
1
thin film
1
Classification
FAF - Materials research - comprehensive works
FGME - Microlithography
2
FNK - Plastics - application, engineering aspects
1
FNL - Polymers, plastics - specific materials
1
×
Loading...
