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EUV lithography [E-Book] /
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Surface patterning by means of soft lithography for molecular and bio-electronics [E-Book] /
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Alternative lithography : unleashing the potentials of nanotechnology /
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Principles of lithography /
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Emerging lithographic technologies : proceedings 10-11 March 1997 Santa Clara, California /
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Handbook of microlithography, micromachining, and microfabrication. 2. Micromachining and microfabrication /
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Handbook of microlithography, micromachining, and microfabrication. 1. Microlithography /
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Introduction to microlithography.
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Mikromechanik : Einführung in Technologie und Anwendungen.
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Resists in microlithography and printing.
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Bednar, B.
1993
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Materials aspects of x-ray lithography : Symposium on materials aspects of x-ray lithography: papers : MRS spring meeting : San-Francisco, CA, 12.04.93-14.04.93.
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The Physics of submicron lithography /
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Advances in electronics and electron physics. Microelectronics and microscopy /
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Handbook of VLSI microlithography : principles, technology, and applications /
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Materials science of high temperature polymers for microelectronics : Symposium on materials science of high temperature polymers for microelectronics : MRS spring meeting 1991: symposium J : Anaheim, CA, 29.04.91-02.05.91.
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Metallic structures with reduced dimensions /
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Polymerwerkstoffe für die Elektronik. 2 : Symposium : Würzburg, 16.10.90-17.10.90.
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Polymers for microelectronics: science and technology : International Symposium on Polymers for Microelectronics - science and technology: proceedings : PME : 1989: proceedings : Tokyo, 29.10.89-02.11.89.
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Tabata, Y.
1990
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Microcircuit engineering. 1989 : Microcircuit engineering: international conference. 15 : International conference on microlithography : ME. 1989 : Cambridge, 26.09.89-28.09.89 /
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Microelectronic polymers /
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