1
Materials science of high temperature polymers for microelectronics : Symposium on materials science of high temperature polymers for microelectronics : MRS spring meeting 1991: symposium J : Anaheim, CA, 29.04.91-02.05.91.
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“...FGME - Microlithography...”
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Polymers for microelectronics: science and technology : International Symposium on Polymers for Microelectronics - science and technology: proceedings : PME : 1989: proceedings : Tokyo, 29.10.89-02.11.89.
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Tabata, Y.
1990
“...FGME - Microlithography...”
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Polymers in microlithography: materials and processes : Polymers in microlithography: materials and processes: symposium : National meeting of the American Chemical Society. 0197 : Dallas, TX, 09.04.89-14.04.89.
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“...FGME - Microlithography...”
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Polymers in microelectronics: fundamentals and applications.
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“...FGME - Microlithography...”
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Polymers for high technology: electronics and photonics : Polymers for high technology: symposium : Meeting of the American Chemical Society. 0192 : Anaheim, CA, 07.09.86-12.09.86.
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“...FGME - Microlithography...”
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