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Handbook of microlithography, micromachining, and microfabrication. 1. Microlithography /
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Handbook of microlithography, micromachining, and microfabrication. 2. Micromachining and microfabrication /
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Mikromechanik : Einführung in Technologie und Anwendungen.
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Handbook of VLSI microlithography : principles, technology, and applications /
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