1
Emerging lithographic technologies : proceedings 10-11 March 1997 Santa Clara, California /
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“...FGME - Microlithography...”
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Materials aspects of x-ray lithography : Symposium on materials aspects of x-ray lithography: papers : MRS spring meeting : San-Francisco, CA, 12.04.93-14.04.93.
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Materials science of high temperature polymers for microelectronics : Symposium on materials science of high temperature polymers for microelectronics : MRS spring meeting 1991: symposium J : Anaheim, CA, 29.04.91-02.05.91.
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Polymerwerkstoffe für die Elektronik. 2 : Symposium : Würzburg, 16.10.90-17.10.90.
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Polymers for microelectronics: science and technology : International Symposium on Polymers for Microelectronics - science and technology: proceedings : PME : 1989: proceedings : Tokyo, 29.10.89-02.11.89.
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Tabata, Y.
1990
“...FGME - Microlithography...”
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Microcircuit engineering. 1989 : Microcircuit engineering: international conference. 15 : International conference on microlithography : ME. 1989 : Cambridge, 26.09.89-28.09.89 /
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Electron beam, x-ray, and ion beam technology: submicrometer lithographies. 0008: proceedings : San-Jose, CA, 01.03.89-03.03.89.
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Polymers in microlithography: materials and processes : Polymers in microlithography: materials and processes: symposium : National meeting of the American Chemical Society. 0197 : Dallas, TX, 09.04.89-14.04.89.
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Optical/laser microlithography. 0002 : Optical/laser microlithography. 0002: conference : San-Jose, CA, 01.03.89-03.03.89.
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Lin, B. J.
1989
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Advances in resist technology and processing. 0005: conference : Santa-Clara, CA, 29.02.88-02.03.88.
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Optical laser microlithography : Santa-Clara, CA, 02.03.88-04.03.88.
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Lin, B. J.
1988
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Electron beam, x-ray and ion beam technology: submicrometer lithographies. 0007: conference : Santa-Clara, CA, 02.03.88-04.03.88.
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Microcircuit engineering 1987 : International conference on microlithography: proceedings : Paris, 22.09.87-25.09.87.
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Optical microlithographic technology for integrated circuit fabrication and inspection: proceedings : Den-Haag, 02.04.87-03.04.87.
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Polymers for high technology: electronics and photonics : Polymers for high technology: symposium : Meeting of the American Chemical Society. 0192 : Anaheim, CA, 07.09.86-12.09.86.
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Advances in resist technology and processing : 0004: proceedings : Santa-Clara, CA, 02.03.87-03.03.87.
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Lasers in microlithography: proceedings : Santa-Clara, CA, 02.03.87-03.03.87.
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Electron beam, X-ray and ion beam lithographies : 0006: proceedings : Santa-Clara, CA, 05.03.87-06.03.87.
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Optical microlithography : 0006: proceedings : Santa-Clara, CA, 04.03.87-05.03.87.
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Microcircuit engineering 1986 : ME 1986 : proceedings of the International Conference on Microlithography : Interlaken, September 23 - 25, 1986 /
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