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Select result number 1
1
Book
Mikromechanik : Einführung in Technologie und Anwendungen.
Buettgenbach, S.
1994
“
...
FGME
-
Microlithography
...
”
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Buettgenbach, S.
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actuator
mechanics
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microfabrication (for microelectronics only)
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microlithography
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microtechnology
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FGME - Microlithography
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