1
Surface patterning by means of soft lithography for molecular and bio-electronics [E-Book] /
“...FGME - Microlithography...”

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Handbook of microlithography, micromachining, and microfabrication. 1. Microlithography /
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Emerging lithographic technologies : proceedings 10-11 March 1997 Santa Clara, California /
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Advances in electronics and electron physics. Microelectronics and microscopy /
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Electron beam, x-ray, and ion beam techniques for submicrometer lithographies. 3 /
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Wagner, A.
1984
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Fine line lithography.
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Newman, R.
1980
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On the throughput optimization of electron beam lithography systems /
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