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ion beam lithography
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ion beam lithography
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1
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Electron beam, x-ray, and ion beam techniques for submicrometer lithographies. 3 /
Wagner, A.
1984
“
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FGME
-
Microlithography
...
”
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Wagner, A.
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X-ray lithography
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electron beam lithography
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ion beam lithography
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FGME - Microlithography
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