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Alternative lithography : unleashing the potentials of nanotechnology /
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Principles of lithography /
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Handbook of microlithography, micromachining, and microfabrication. 1. Microlithography /
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Handbook of microlithography, micromachining, and microfabrication. 2. Micromachining and microfabrication /
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Emerging lithographic technologies : proceedings 10-11 March 1997 Santa Clara, California /
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Mikromechanik : Einführung in Technologie und Anwendungen.
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Introduction to microlithography.
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Resists in microlithography and printing.
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Bednar, B.
1993
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The Physics of submicron lithography /
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Handbook of VLSI microlithography : principles, technology, and applications /
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Metallic structures with reduced dimensions /
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Microcircuit engineering. 1989 : Microcircuit engineering: international conference. 15 : International conference on microlithography : ME. 1989 : Cambridge, 26.09.89-28.09.89 /
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Polymers for microelectronics: science and technology : International Symposium on Polymers for Microelectronics - science and technology: proceedings : PME : 1989: proceedings : Tokyo, 29.10.89-02.11.89.
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Tabata, Y.
1990
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Microcircuit engineering 1986 : ME 1986 : proceedings of the International Conference on Microlithography : Interlaken, September 23 - 25, 1986 /
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Microlithography : process technology for IC fabrication /
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Microcircuit engineering 1985 : ME 1985 : proceedings of the International Conference on Microlithography : Rotterdam, September 23 - 25, 1985 /
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Optical microlithography. 0004 : Santa-Clara, CA, 13.03.1985-14.03.1985 n/
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Maskentechnik für Mikroelektronik Bausteine : Tagung : München, 14.11.85
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1985
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Maskentechnik für Mikroelektronik Bausteine : Tagung : München, 15.11.84
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1985
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Microcircuit engineering. 1984 : Microcircuit engineering conference. 1984: proceedings : ME. 1984: proceedings : Berlin, 25.09.1984-29.09.1984.
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