/* Narrow Search Options */ ?>
/* End Narrow Search Options */ ?>
Narrow Search Results
Bakish, R.
6
Stover, H. L.
5
Blais, P. D.
3
Thompson, L. F.
3
Ahmed, Haroon
2
Bowden, M. J.
2
more ...
Cleaver, John R. A.
2
Jones, Geraint A. C.
2
Lin, B. J.
2
Rai-Choudhury, P.
2
Yanof, A. W.
2
Bakshi, Vivek
1
Ballantyne, J. P.
1
Bednar, B.
1
Benoit, H.
1
Brewer, George Raymond.
1
Broers, Alec Nigel
1
Buettgenbach, S.
1
Castagne, R.
1
Celler, G. K.
1
Dey, J.
1
Diaz, A. F.
1
Ehrlich, D. J.
1
Einspruch, N. G.
1
Elliott, David J.
1
Feit, E. D.
1
Giffin, J. W.
1
Glendinning, William B.
1
Grubb, D. T.
1
Hawkes, Peter W.
1
see all ...
less ...
microlithography
23
optical microlithography
15
photoresist
12
electron beam lithography
7
X-ray lithography
6
microelectronics
6
more ...
microfabrication (for microelectronics only)
5
lithography
4
polymer
4
molecular electronics
2
Optical coatings.
1
Photolithography.
1
Ultraviolet radiation
1
actuator
1
atom
1
electric material
1
electron beam welding
1
electron transport
1
electronic packaging
1
interaction
1
ion beam lithography
1
ion implantation
1
ionizing radiation
1
light source
1
low dimensional system
1
mechanics
1
metrology
1
microtechnology
1
molecule
1
nanostructures
1
see all ...
less ...
FGME - Microlithography
69
FGJ - Laser and electron beam processing
8
FGGE - Ion beam surface modification
7
FNK - Plastics - application, engineering aspects
5
FAF - Materials research - comprehensive works
2
FHJ - Scanning electron microscopy, analytical electron microscopy
2
more ...
FJEH - Molecular electronics
2
FNL - Polymers, plastics - specific materials
2
CER - Macromolecular compounds - synthesis and reactions
1
FGM - Microelectronic technology
1
FGML - Characterization of electronic materials
1
FGN - Nanotechnology
1
FLE - Superconductor materials
1
FNKG - Stability of plastics - physical and chemical effects
1
FPUD - Organic coatings
1
TBD - Microelectronics
1
TEA - Electrical engineering - general
1
see all ...
less ...