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Broadbent, E. K.
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Tungsten and other refractory metals for VLSI applications. 2 : Workshop on Tungsten and Other Refractory Metals for VLSI Application : 1986: proceedings : Palo-Alto, CA, 12.11.86-...
Broadbent, E. K.
1987
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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Broadbent, E. K.
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VLSI technology
1
chemical vapor deposition
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metallization
1
tungsten
1
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FGMH - Metallization, physics of microelectronics
1
FMT - Refractory metals, refractory alloys
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