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ULSI (ultra large scale integration)
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ULSI (ultra large scale integration)
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1
Book
Gate dielectrics and MOS ULSls : principles, technologies and applications /
Hori, Takashi
1997
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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2
Book
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, USA : [Symposium on Advanced Metallization for Future ULSI] /
Tu, K. N.
1997
“
...
FGMH
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Metallization
,
physics
of
microelectronics
...
”
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3
Book
Submicrometer metallization: the challenges, opportunities, and limitations : Submicrometer metallization: the challenges, opportunities, and limitations: conference : SPIE symposi...
Kwok, T.
1993
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...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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3
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3
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2
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ZB
2
IFF
1
Name
Hori, Takashi
1
Kwok, T.
1
Tu, K. N.
1
Subject
ULSI (ultra large scale integration)
metallization
2
MIS transistor
1
MOS transistor
1
VLSI (very large scale integration)
1
construction
1
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design
1
field effect transistor
1
integrated circuit
1
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Classification
FGMH - Metallization, physics of microelectronics
3
FGM - Microelectronic technology
1
TBL - VLSI
1
Language
English
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