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1
Book
Chemical vapor deposition of tungsten and tungsten silicides for VLSI/ULSI applications /
Schmitz, John E. J.
1992
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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2
Book
Tungsten and other refractory metals for VLSI applications. 2 : Workshop on Tungsten and Other Refractory Metals for VLSI Application : 1986: proceedings : Palo-Alto, CA, 12.11.86-...
Broadbent, E. K.
1987
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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Broadbent, E. K.
1
Schmitz, John E. J.
1
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VLSI technology
2
chemical vapor deposition
metallization
2
tungsten
2
silicide
1
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FGMH - Metallization, physics of microelectronics
2
FGKF - Chemical vapor deposition
1
FMT - Refractory metals, refractory alloys
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