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1
Book
Gettering and defect engineering in semiconductor technology : GADEST 2003 : proceedings of the 10th international autumn meeting Seehotel Zeuthen (suburb of Berlin) State of Brand...
Richter, H.
2004
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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2
Book
Gettering and defect engineering in the semiconductor technology : International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology. 0002: proceedings...
Richter, Harald
1987
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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3
Book
Gettering and defect engineering in the semiconductor technology (GADEST) : International Autumn School / Academy of Sciences of the GDR, Institute for Physics of Semiconductors, P...
Richter, Harald
1985
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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ZB
2
IBN-1-2
1
Name
Richter, Harald
2
Richter, H.
1
Subject
gettering
semiconductor
3
semiconductor heterostructure
3
semiconductor interface
3
crystal defect
2
engineering
1
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technology
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FGMH - Metallization, physics of microelectronics
3
FJHE - Defects and radiation effects in semiconductors
3
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