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semiconductor processing
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semiconductor processing
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1
Book
Transport simulation in microelectronics /
Kersch, Alfred.
1995
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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2
Book
Chemical perspectives of microelectronics materials. 0002 : Biennial Meeting of Chemical Perspectives of Microelectronic Materials : 0002: proceedings : Materials Research Society...
Interrante, L. V.
1991
“
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FGMH
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Metallization
,
physics
of
microelectronics
...
”
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3
Book
Symposium on materials issues in silicon integrated circuit processing : Palo-Alto, CA, 15.04.1986-18.04.1986.
Wittmer, M.
1986
“
...
FGMH
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Metallization
,
physics
of
microelectronics
...
”
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Available as
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3
Material Type
Book
3
Type of Literature
Conference Publication
2
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ZB
3
Name
Interrante, L. V.
1
Kersch, Alfred.
1
Morokoff, William J.
1
Wittmer, M.
1
Subject
semiconductor processing
semiconductor epitaxy
2
Monte Carlo method
1
compound semiconductor
1
gallium arsenide
1
metallic film
1
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microelectronics
1
modeling
1
numerical simulation
1
rapid thermal processing
1
semiconductor surface
1
silicon
1
surface chemistry
1
transport phenomena
1
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Classification
FGMH - Metallization, physics of microelectronics
3
FAF - Materials research - comprehensive works
2
FANE - Computational solid state physics
1
FGCD - Crystal growth of specific substances
1
FGKF - Chemical vapor deposition
1
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