1
Silicides : fundamentals and applications : proceedings of the 16th course of the international school of solid state physics, Erice, Italy 5 - 6. June 1999 /
Book
...FGMH - Metallization, physics of microelectronics...
2
Chemical vapor deposition of tungsten and tungsten silicides for VLSI/ULSI applications /
Book
...FGMH - Metallization, physics of microelectronics...
3
Silizide der Übergangsmetalle als Diffusionsquellen zur Erzeugung flacher Dotierungsgebiete in der VLSI-Technologie.
Book
Probst, V.
1991
...FGMH - Metallization, physics of microelectronics...