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Blewer, R. S.
2
Constantopoulos, N.
2
Ho, P. S.
2
Jaccodine, R.
2
Kaiser, G.
2
Kassabov, J.
2
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Katz, A.
2
Murarka, Shyam P.
2
Richter, Harald
2
Wade, T. E.
2
Abernathy, Cammy R.
1
Barfknecht, A. T.
1
Bates, C. W.
1
Bilotta, A. J.
1
Black, R. D.
1
Boergesen, P.
1
Bohling, D. A.
1
Borgesen, P.
1
Bravman, John C.
1
Broadbent, E. K.
1
Butler, J. J.
1
Carrington, R.
1
Christou, A.
1
Christou, Aris
1
Clement, J. Joseph
1
Cohen, S. S.
1
Draper, C. R.
1
Einspruch, N. G.
1
Eppler, Ingo
1
Filter, William F.
1
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metallization
26
microelectronics
20
VLSI technology
16
electromigration
13
reliability
10
electronic packaging
9
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tungsten
6
integrated circuit
5
semiconductor
5
semiconductor heterostructure
5
VLSI (very large scale integration)
4
information technology
4
semiconductor interface
4
thermal stress
4
MOS transistor
3
ULSI (ultra large scale integration)
3
gettering
3
mechanical properties
3
mechanical stress
3
semiconductor processing
3
silicide
3
X-ray diffraction
2
alloy
2
aluminum
2
chemical vapor deposition
2
crystal defect
2
failure
2
gallium arsenide
2
microstructure
2
modeling
2
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FGMH - Metallization, physics of microelectronics
108
FAF - Materials research - comprehensive works
16
FGM - Microelectronic technology
9
FFPE - Thin film electronic properties, semiconductor interfaces
5
FMT - Refractory metals, refractory alloys
5
FAQ - Materials research - institutions, research and development
3
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FGKF - Chemical vapor deposition
3
FJHE - Defects and radiation effects in semiconductors
3
FCAB - X-ray crystallography, X-ray diffraction
2
FFME - Surface forces, adhesion, thin film mechanical properties
2
FJKB - Elemental semiconductors
2
FMH - Thermomechanical treatment, precipitations, recrystallization, texture
2
TBT - Optoelectronics, optical fibers, displays
2
FAAB - Solid state physics - reference books
1
FANE - Computational solid state physics
1
FDCD - Dislocations
1
FDKB - Diffusion in condensed matter
1
FFP - Physics of thin films
1
FFPG - Multilayer systems, quantum structures
1
FGCD - Crystal growth of specific substances
1
FGK - Thin film technology, epitaxy
1
FGML - Characterization of electronic materials
1
FJB - Electric materials
1
FJK - Specific semiconductor materials
1
FJKD - Compound semiconductors
1
FJL - Physics of solid state devices
1
FJLB - Physics of semiconductor devices
1
FMGH - Metallographic microscopy, metallographic stereology
1
FMHF - Grain boundaries, polycrystals
1
FMV - Light metals, metallic foams
1
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