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Chen, J.
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Chen, J.
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Materials and process characterization for VLSI, 1988 (ICMPC '88) : proceedings of the international conference : Oct. 24-29, 1988, Shanghai, China /
Zong, X.-F.
1988
“
...
FGML
-
Characterization
of
electronic
materials
...
”
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Chen, J.
Wang, Y.-Y.
1
Zong, X.-F.
1
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FGML - Characterization of electronic materials
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