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1
Book
Laser processing and diagnostics. 2. European Materials Research Society : spring meeting. 1986 : Strasbourg, 17.06.1986-20.06.1986 /
Bäuerle, Dieter
1986
“
...
FGML
-
Characterization
of
electronic
materials
...
”
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2
Book
Laser processing and diagnostics : International conference on laser processing and diagnostics - applications in electronic materials : Linz, 15.07.1984-19.07.1984.
Bäuerle, Dieter
1984
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FGML
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Characterization
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materials
...
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3
Book
Laser diagnostics and photochemical processing for semiconductor devices : Materials Research Society Annual Meeting 1982 : Boston, MA, 01.11.1982-04.11.1982.
Osgood, R. M.
1983
“
...
FGML
-
Characterization
of
electronic
materials
...
”
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Available as
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3
Material Type
Book
3
Type of Literature
Conference Publication
3
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Location
ZB
3
Name
Bäuerle, Dieter
2
Kompa, Karl L.
1
Laude, Lucien D.
1
Osgood, R. M.
1
Subject
laser processing
laser beam solid interaction
2
semiconductor processing
1
Classification
FGJ - Laser and electron beam processing
3
FGML - Characterization of electronic materials
3
FAF - Materials research - comprehensive works
1
Language
English
1
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