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Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
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From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
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Manufacturing techniques for microfabrication and nanotechnology /
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Nano/microscale heat transfer /
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Einführung in die Mikrosystemtechnik : Grundlagen und Praxisbeispiele /
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Nanosystems : molecular machinery, manufacturing, and computation /
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Mikromechanik : Mikrofertigung mit Methoden der Halbleitertechnologie /
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