1
Annual International Workshop on Micro Electro Mechanical Systems. 11 : an investigation of micro structures, sensors, acuators, machines and systems : proceedings : January 25-29, 1998, Heidelberg, Germany : MEMS 98 /
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1998
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2
Actuator 1996 : International conference on new actuators 0005: conference proceedings : Bremen, 26.06.96-28.06.96.
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“...FGT - Microtechnology...”
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3
Smart structures and materials 1995: smart structures and integrated systems: proceedings : San-Diego, CA, 27.02.95-03.03.95.
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Chopra, I.
1995
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Actuator 1994: proceedings : International conference on new actuators 0004: proceedings : Bremen, 15.06.94-17.06.94.
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Micro system technologies 1994 : International conference on micro electro, opto, mechanical systems and components 0004 : Micro system technologies: international conference 0004 : MST 1994 : Berlin, 19.10.94-21.10.94.
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Reichl, H.
1994
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Micro system technologies 1991 : International conference on micro electro, opto, mechanic systems and components 0002 : Micro system technologies: international conference 0002 : Berlin, 29.10.91-01.11.91.
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Krahn, R.
1991
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7
Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robots : IEEE Workshop on Micro Electro Mechanical Systems : 0003: proceedings : MEMS : 0003: proceedings : Napa, CA, 11.02.90-14.02.90.
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1990
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