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Silicon carbide 1 : Growth, defects, and novel applications /
Friedrichs, Peter
2010
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Microtechnology
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Mikrosystemtechnik auf Silizium.
Hilleringmann, U.
1995
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Microtechnology
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Friedrichs, Peter
1
Hilleringmann, U.
1
Subject
microtechnology
2
silicon device
crystal growth
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defect analysis
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epitaxy
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materials characterization
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nanostructured material
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optical fiber
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sensor (technical and physical)
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silicon carbide
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surface physics
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FGT - Microtechnology
2
FGC - Crystal growth, crystal technology
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FJK - Specific semiconductor materials
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