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Michel, B.
6
Madou, Marc J.
4
Aslam, Nabeel
2
Borgmann, H.
2
Bäumer, Christoph
2
Kim, Wonjoo
2
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Menz, Wolfgang.
2
Reichl, H.
2
Skaja, Katharina
2
Adey, Robert A.
1
Anderson, Rolfe C.
1
Baldacchini, Tommaso
1
Bauer, M.
1
Becker, Holger
1
Bley, P.
1
Cheng, J.
1
Chopra, I.
1
Datta, Madhav
1
Descroix, Stéphanie
1
Dittmann, Regina
1
Drexler, K. Eric.
1
Effenhauser, C. S.
1
Ehrfeld, W.
1
Eschenbach, Rüdiger.
1
Fatikow, Sergej.
1
Fenton, James M.
1
Frank, Randy.
1
Friedrichs, Peter
1
Funk, Karsten.
1
Gessner, Thomas
1
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microtechnology
47
nanotechnology
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sensor (technical and physical)
11
resistive switching
9
actuator
7
microfabrication (for microelectronics only)
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nanostructured material
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microelectronics
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nanoelectronics
4
metal
3
microstructure
3
Biotechnology.
2
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etching
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microelectromechanical systems (MEMS)
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oxide
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scaling theory
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2
thin film
2
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1
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1
Chemistry.
1
Engineering
1
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1
MOS device
1
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1
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FGT - Microtechnology
74
FGN - Nanotechnology
11
TBW - Sensors, actuators
5
FGM - Microelectronic technology
3
FJK - Specific semiconductor materials
2
ALE - Biographies of scientists and Nobel prize winners - individual
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CXUV - Polymers, dyes
1
FAP - Advanced materials - development and applications
1
FGC - Crystal growth, crystal technology
1
FGJ - Laser and electron beam processing
1
FGK - Thin film technology, epitaxy
1
FGKJ - Plasma processing, etching
1
FGP - Nanoelectronics
1
FHCH - Microstructural analysis
1
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1
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1
FZJ - Schriftenreihen des Forschungszentrums Jülich
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TBD - Microelectronics
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1
TBWA - Sensors (technical and physical)
1
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1
TCLB - Electric waves, microwaves, Radar
1
THM - Heat transfer, mass transfer - technical aspects
1
YRG - Technology transfer
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