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E-Book
Abscheidung von amorphem Silizium (a-Si:H) aus an einem heißen Blech zersetztem Silan [E-Book] /
Horbach, Christian
1991
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FJEC
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Amorphous
semiconductors
...
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Winter European Course on Amorphous Silicon : fundamental properties and applications : 8.-13.2.1988, Folgaria - Italy /
1988
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FJEC
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Amorphous
semiconductors
...
”
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IEK-5
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ZB
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Horbach, Christian
1
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amorphous silicon
2
chemical vapor deposition
silane
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FJEC - Amorphous semiconductors
2
FGKF - Chemical vapor deposition
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FJKB - Elemental semiconductors
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German
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