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Plasmainduzierte Abscheidung von amorphem Silicium aus Silan : vom Verständnis der chemischen Reaktionsmechanismen zur Abscheidung von hochwertigem amorphen Silicium mit grossen De...
Ambacher, Oliver
1993
“
...
FJEC
-
Amorphous
semiconductors
...
”
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2
E-Book
Abscheidung von amorphem Silizium (a-Si:H) aus an einem heißen Blech zersetztem Silan [E-Book] /
Horbach, Christian
1991
“
...
FJEC
-
Amorphous
semiconductors
...
”
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2
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ZB
2
Name
Ambacher, Oliver
1
Horbach, Christian
1
Subject
amorphous silicon
2
silane
chemical vapor deposition
1
plasma deposition
1
Classification
FJEC - Amorphous semiconductors
2
FGKF - Chemical vapor deposition
1
FGKJ - Plasma processing, etching
1
Language
German
2
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