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E-Book
Amorphisierung und Spannungsabbau in Silizidfilmen unter Ionenbeschuß [E-Book] /
Hardtke, Christoph
1992
“
...
FJKB
-
Elemental
semiconductors
...
”
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ZB
1
Name
Hardtke, Christoph
Subject
amorphization
1
ion beam surface modification
1
silicide
1
thin film
1
Classification
FFP - Physics of thin films
1
FGGE - Ion beam surface modification
1
FJKB - Elemental semiconductors
1
Language
German
1
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