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1
Book
Ion implantation range data for silicon and germanium device technologies.
Smith, B.
1977
“
...
FJLB
-
Physics
of
semiconductor
devices
...
”
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1
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Smith, B.
1
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FAAB - Solid state physics - reference books
1
FGGB - Ion implantation, ion beam synthesis
1
FJLB - Physics of semiconductor devices
1
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