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FGME - Microlithography
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FGME - Microlithography
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1
Book
Materials science of high temperature polymers for microelectronics : Symposium on materials science of high temperature polymers for microelectronics : MRS spring meeting 1991: sy...
Grubb, D. T.
1991
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FNL
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Polymers
,
plastics
-
specific
materials
...
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2
Book
Polymerwerkstoffe für die Elektronik. 2 : Symposium : Würzburg, 16.10.90-17.10.90.
Markert, H.
1990
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Polymers
,
plastics
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specific
materials
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Name
Grubb, D. T.
1
Markert, H.
1
Subject
microelectronics
2
polymer
2
electric material
1
electronic packaging
1
photoresist
1
thin film
1
Classification
FGME - Microlithography
FNL - Polymers, plastics - specific materials
2
FAF - Materials research - comprehensive works
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FNK - Plastics - application, engineering aspects
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