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1
Book
Industrial plasma engineering. 2. Applications to nonthermal plasma processing /
Roth, J. Reece.
2001
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Industrial plasma engineering. 1. Principles /
Roth, J. Reece.
1995
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IEK-4
2
Name
Roth, J. Reece.
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Subject
plasma processing
1
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PGA - Plasma physics
2
FGKJ - Plasma processing, etching
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English
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