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1
E-Book
MEMS Reliability [E-Book] /
Hartzell, Allyson L.
2011
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2
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MEMS Materials and Processes Handbook [E-Book] /
Ghodssi, Reza.
2011
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3
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Silicon Carbide Microsystems for Harsh Environments [E-Book] /
Wijesundara, Muthu B. J.
2011
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4
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Multi-Wafer Rotating MEMS Machines [E-Book] : Turbines, Generators, and Engines /
Lang, Jeffrey.
2010
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5
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RF MEMS Switches and Integrated Switching Circuits [E-Book] /
Liu, Ai-Qun.
2010
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6
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Radioisotope Thin-Film Powered Microsystems [E-Book] /
Duggirala, Rajesh.
2010
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7
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MEMS Vibratory Gyroscopes [E-Book] : Structural Approaches to Improve Robustness /
Acar, Cenk
2009
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8
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Photonic Microsystems [E-Book] : Micro and Nanotechnology Applied to Optical Devices and Systems /
Solgaard, Olav.
2009
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Acar, Cenk
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Azevedo, Robert
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Lin, Pinyen.
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Shkel, Andrei
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da Silva, Mark G.
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