Skip to content
Toggle navigation
VuFind
0
Items in e-Shelf
(Full)
History
User Account
Logout
User Account
Help
English
Deutsch
Books & more
Articles & more
JuSER
All Fields
Title
Journal Title
Name
Institution
Subject
Classification
Shelf Classification
Table of Contents
DOI
ISBN/ISSN
Call number
Report Number
Barcode
Full Texts (available in selection)
Find
Advanced
Reset Filters
Powell, R. A.
Reset Filters
Show filters (1)
Powell, R. A.
Ask a Librarian
Books & more
: Hits
1 - 1
of
1
sort by
Relevance
Year (descending)
Year (ascending)
Call Number
Author
Title
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Select result number 1
1
Book
Dry etching for microelectronics.
Powell, R. A.
1984
“
...
Materials
processing
;...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Back
Narrow Search Results
Available as
Print Edition
1
Material Type
Book
1
Year of Publication
From:
To:
Location
IEK-5
1
ZB
1
Name
Powell, R. A.
Subject
etching
1
Classification
FGKJ - Plasma processing, etching
1
FGM - Microelectronic technology
1
×
Loading...
